Reactive Ion Etch (RIE)

Reactive Ion Etch (RIE)

We offer the Trion Technology Inc. Reactive Ion Etch systems. Trion manufactures a wide variety of systems for the R&D, Compound Semiconductor, MEMS, Opto-Electronic and other markets. Trion RIE systems feature the smallest footprint and lowest cost in the industry with proven production reliability.

Sirus T2 Bench-Top RIE

Sirus T2 Bench-Top RIE

Minilock-Phantom III - RIE with Vacuum Loadlock

Minilock-Phantom III - RIE with Vacuum Loadlock

Phantom III RIE System

Phantom III RIE

Oracle III - Production PECVD/RIE

Oracle - Production PECVD/RIE

IC Delayering to Metal 2 

Titan- Loadlocked RIE with Vacuum Cassette Elevator

Titan- Loadlocked RIE with Vacuum Cassette Elevator


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