New Mapping Ellipsometers from Film Sense

Film Sense is pleased to announce the FS-XY150 and FS-RT300 automated film thickness mapping systems.

These products combine an FS‑1™ Multi-Wavelength Ellipsometer with compact mapping stages to provide fast, accurate, and reliable film thickness uniformity measurements across a wafer.

The FS-XY150


The FS-RT300



Features and Specifications

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