OptiGlow ACE Plasma System

OptiGlow ACE Plasma SystemOptiGlow ACE Plasma Systems is made for Ashing/Activating, Cleaning and Etching (ACE). 

The plasma chamber, constructed of Anodized aluminum.

The OptiGlow plasma system is equipped with 10 to 150 watts generator with automatic tuning system at 13.56 MHz.

The system comes with two flow meters.

The system can be operated in plasma or RIE style processing with oxygen, argon or CF4 chemistry. The sample holder has two shelves: top shelf for RIE, bottom shelf for plasma processing. 

It is designed for long processing time-push button, automatic operation. 

The chamber size is 127mm wide x 127mm tall x 177mm deep

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