GEMINI Multi-Chamber Plasma Stripper

Gemini-Multi Chamber StrippersThe Gemini is the most compact, inexpensive and versatile system, which can handle 100-300mm wafers. This multi-chamber, high throughput stripping system is designed specifically for the demands of today's production fabs.

Important system features:

  • 100-300mm wafers
  • High throughput stripping system
  • Employing ICP
  • Microwave and RF bias power as needed
  • Etch rates up to 6um/min
  • High throughput
  • Low plasma damage
  • Self tuning
  • Small footprint
  • Competitively priced


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