Apollo Plasma Stripper

Apollo Strippers

The Apollo is a compact, inexpensive and versatile Photo resist striping system, which can handle 100-300mm wafers. By employing either ICP or microwave and RF bias power as needed, difficult to remove layers of resist can be removed at low temperatures.

Important System Features:

  • Etch rates up to 6um/min
  • 100mm to 300mm wafers
  • High throughput
  • Small footprint
  • Low plasma damage
  • Competitively priced
  • Self-tuning


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